A Short Course on Intermediate Dimensional Metrology
Dr. Ted Doiron, Group Leader, Dimensional Metrology, NIST, Gaithersburg, MD
Dr. Theodore Doiron is the leader of and a physicist in the Dimensional Metrology Group in the Semiconductor & Dimensional Metrology Division of the Physical Measurement Laboratory (PML) at the National Institute of Standards and Technology (NIST). Ted has numerous research publications in the dimensional measurements including the monograph “The Gage Block Handbook”, and a few more controversial works such as “Gauge Blocks – A Zombie Technology”, “The Case Against the Measurement of Gage blocks by Interferometry”, and “The Metrology of Complimentary Small Plastic Rulers”.
Intermediate Dimensional Metrology
A large number of books exist on dimensional metrology. Nearly all of them are at the beginner level on how to use the instruments for inspection. Thermal expansion, elastic deformation, stability, refractive index of air, closure and reversal methods, deterministic metrology, comparator principle and the use of check standards are generally ignored. This course will be an overview of some of these important techniques and concepts not covered in books and classes. Each concept will be presented with examples of how the techniques make measurements more accurate, and in some cases, more efficient.
Dimensional metrology does have a few very basic concepts and large number of tricks of the trade. This course is aimed at being an entry point for metrologists who already know how to operate their measuring equipment.
Wednesday, February 27, 2013 1:00-5:00 pm | Dana Hall 102