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Center for Manufacturing and Metrology Zygo New View 7300 Surface Profiler

The New View 7300 is a non-contact optical profilometer capable of producing highly accurate, 3D surface topography measurements. The 7300 rapidly measures heights from less than 1 micron up to 20 millimeters, with vertical resolution to 0.1 nm. It is ideally suited for inspecting step heights, MEMS devices, and many other applications. With the stitching option large areas can be measured and combined to form one image. It also has a stroboscopic measurement capability which will takes movies of moving structures like comb drives and oscillators.

Zygo New View 7300 Surface Profiler image

Fast non-contact measurements, 3D surface profiling base on white light interferometry
Sub-angstrom Z resolution
Sub micron lateral resolution.
Motorized objective and zoom lens turret.
Motorized 150 mm sample stage with tip/tilt control.
Leading-edge precision & gage capability
Enhanced optical imaging
Field stitching capability for measuring large surface area.
Thin film capability for measuring semi-transparent film thickness of 500 nm and above.

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